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Friedbacher, Gernot (Herausgeber); Bubert, Henning (Herausgeber)

Surface and Thin Film Analysis A Compendium of Principles, Instrumentation, and Applications (Gebundene Ausgabe)

Wiley VCH Verlag GmbH, Wiley-VCH Verlag GmbH & Co. KGaA, April 2011


2. vollständig überarbeitete und erweiterte Auflage - 533 S. - Sprache: Deutsch - 267 schwarz-weiße und 11 farbige Abbildungen, 10 schwarz-weiße Tabellen - 247x182x33 mm

ISBN: 3527320474 EAN: 9783527320479

Surveying and comparing all techniques relevant for practical applications in surface and thin film analysis, this second edition of a bestseller is a vital guide to this hot topic in nano- and surface technology. This new book has been revised and updated and is divided into four parts - electron, ion, and photon detection, as well as scanning probe microscopy. New chapters have been added to cover such techniques as SNOM, FIM, atom probe (AP),and sum frequency generation (SFG). Appendices with a summary and comparison of techniques and a list of equipment suppliers make this book a rapid reference for materials scientists, analytical chemists, and those working in the biotechnological industry. From a Review of the First Edition (edited by Bubert and Jenett) "... a useful resource..." (Journal of the American Chemical Society)


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Inhaltsverzeichnis

Preface INTRODUCTION PART I: Electron Detection X-RAY PHOTOELECTRON SPECTROSCOPY (XPS) Principles Instrumentation Spectral Information and Chemical Shifts Quantification, Depth Profiling, and Imaging The Auger Parameter Applications Ultraviolet Photoelectron Spectroscopy (UPS) AUGER ELECTRON SPECTROSCOPY (AES) Principles Instrumentation Spectral Information Quantification and Depth Profiling Applications Scanning Auger Microscopy (SAM) ELECTRON ENERGY-LOSS SPECTROSCOPY (EELS) AND ENERGY-FILTERING TRANSMISSION ELECTRON MICROSCOPY (EFTEM) Principles Instrumentation Qualitative Spectral Information Quantification Imaging of Element Distribution Summary LOW-ENERGY ELECTRON DIFFRACTION (LEED) Principles and History Qualitative Information Quantitative Structural Information Low-Energy Electron Microscopy OTHER ELECTRON-DETECTING TECHNIQUES Ion (Excited) Auger Electron Spectroscopy (IAES) Ion Neutralization Spectroscopy (INS) Inelastic Electron Tunneling Spectroscopy (IETS) PART II: Ion Detection STATIC SECONDARY ION MASS SPECTROMETRY (SSIMS) Principles Instrumentation Quantification Spectral Information Applications DYNAMIC SECONDARY ION MASS SPECTROMETRY (SIMS) Principles Instrumentation Spectral Information Quantification Mass Spectra Depth Profiles Imaging Three-Dimensional (3-D)-SIMS Applications ELECTRON-IMPACT (EI) SECONDARY NEUTRAL MASS SPECTROMETRY (SNMS) Introduction General Principles of SNMS Instrumentation and Methods Spectral Information and Quantification Element Depth Profiling Applications LASER SECONDARY NEUTRAL MASS SPECTROMETRY (LASER-SNMS) Principles Instrumentation Spectral Information Quantification Applications RUTHERFORD BACKSCATTERING SPECTROSCOPY (RBS) Introduction Principles Instrumentation Spectral Information Quantification Figures of Merit Applications Related Techniques LOW-ENERGY ION SCATTERING (LEIS) Principles Instrumentation LEIS Information Quantification Applications of LEIS ELASTIC RECOIL DETECTION ANALYSIS (ERDA) Introduction Fundamentals Particle Identification Methods Equipment Data Analysis Sensitivity and Depth Resolution Applications NUCLEAR REACTION ANALYSIS (NRA) Introduction Principles Equipment and Depth Resolution Applications FIELD ION MICROSCOPY (FIM) AND ATOM PROBE (AP) Introduction Principles and Instrumentation Applications OTHER ION-DETECTING TECHNIQUES Desorption Methods Glow-Discharge Mass Spectroscopy (GD-MS) Fast-Atom Bombardment Mass Spectroscopy (FABMS) PART III: Photon Detection TOTAL-REFLECTION X-RAY DLUORESCENCE (TXRF) ANALYSIS Principles Instrumentation Spectral Information Quantification Applications ENERGY-DISPERSIVE X-RAY SPECTROSCOPY (EDXS) Principles Practical Aspects of X-Ray Microanalysis and Instrumentation Qualitative Spectral Information Quantification Imaging and Element Distribution Summary GRAZING INCIDENCE X-RAY METHODS FOR NEAR-SURFACE STRUCTURAL STUDIES Principles Experimental Techniques and Data Analysis Applications GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY (GD-OES) Principles Instrumentation Spectral Information Quantification Depth Profiling Applications SURFACE ANALYSIS BY LASER ABLATION Introduction Instrumentation Depth Profiling Near-Field Ablation Conclusion ION BEAM SPECTROCHEMICAL ANALYSIS (IBSCA) Principles Instrumentation Spectral and Analytical Information Quantitative Analysis by IBSCA Applications REFLECTION ABSORPTION IR SPECTROSCOPY (RAIRS) Instrumentation Principles Applications Related Techniques SURFACE RAMAN SPECTROSCOPY Principles Surface-Enhanced Raman Scattering (SERS) Instrumentation Spectral Information Quantification Applications Nonlinear Optical Spectroscopy UV-VIS-IR ELLIPSOMETRY (ELL) Principles Instrumentation Applications SUM FREQUENCY GENERATION (SFG) SPECTROSCOPY Introduction to SFG Spectroscopy SFG Theory SFG Instrumentation and Operation Modes Applications of SFG Spectroscopy and Selected Case Studies Conclusion OTHER PHOTON-DETECTING TECHNIQUES Appearance Potential Methods Inverse Photoemission Spectroscopy (IPES) and Bremsstrahlung PART IV: Scanning Probe Microscopy INTRODUCTION ATOMIC FORCE MICROSCOPY (AFM) Principles Further Modes of AFM Operations Instrumentation Applications SCANNING TUNNELING MICROSCOPY (STM) Principles Instrumentation Lateral and Spectroscopy Information Applications SCANNING NEAR-FIELD OPTICAL MICROSCOPY (SNOM) Introduction Instrumentation and Operation SNOM Applications Outlook APPENDIX Summary and Comparison of Techniques Surface and Thin-Film Analytical Equipment Suppliers

Über den Autor

Gernot Friedbacher is Associate Professor of Analytical Chemistry at the Vienna University of Technology. His research activities are focused on investigation of surfaces and surface processes with scanning probe microscopy and electron probe x-ray microanalysis covering a broad field of applications ranging from basic research on thin film systems to materials science. Over the last decades he has held numerous theoretical and practical courses in the field of analytical chemistry with emphasis on intstrumental analysis and surface- and interface analysis. Prof. Friedbacher has published over 120 research articles, reviews, and book chapters. Henning Bubert worked at the Institut für Analytische Wissenschaften - ISAS - (Institute for Analytical Sciences) in Dortmund until his retirement in 2003. He is currently working as guest scientist. His research activities are mainly focused on investigation of surfaces and thin films by electron spectroscopy related to the development and application of new materials in mechanical engineering. He has published over 110 research articles, reviews, and book chapters.

Kritikerstimmen

"This book is a handy reference work and contains much useful information for laboratories specializing in one or a few of the techniques; it enables them to compare their methodology with the many other techniques for surface and thin-film analysis." ( Anal Bioanal Chem , 2011) "...a useful resource..." Journal of the American Chemical Society


ISBN 3-527-32047-4

ISBN 978-3-527-32047-9

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